Spectroscopic confocal microscope with aperture stop for increased spatial resolution and parallelized data acquisition

摘要

A confocal microscopy apparatus (10) for irradiating a measuring region of a specimen with light and for obtaining spectral information of light from the measuring region, comprising: a specimen irradiation means (20); an objective lens (32); an imaging lens (34); an aperture stop (36) having a plurality of openings disposed on an imaging plane of the imaging lens; and spectrum obtaining means (50, 60) for detecting and for obtaining the spectral information of light passing through each of the openings. Therefore, the spectral information according to light passing through each opening maintains the same spatial resolution as that obtained with the aperture stop having a circular opening, and the spectral information of light from the plurality of points of the specimen can be obtained altogether. Consequently, distribution measurement of a given measuring region of the specimen can be executed with high resolution and at high speed.