Apparatus for manufacturing metal-ceramic fine layered composite materials by HV-SCDB (High Vacuum Surface Controlled Direct Bonding)

摘要

PURPOSE: A manufacturing apparatus of a metal-ceramic fine layered composite material is provided to maintain an insulating state between metals, and to improve the exothermic performance between the metals by directly bonding a metallic base material and a ceramics base material using a high vacuum surface controlled direct bonding method. CONSTITUTION: A manufacturing apparatus of a metal-ceramic fine layered composite material includes a vacuum chamber (100), an ion gun (200), and a bonding unit (300). The vacuum chamber has the plasma-generating gas atmosphere. The ion gun generates plasma using plasma-generating gas. The bonding unit is installed in the vacuum chamber, stores a metallic base material and a ceramics base material, and surface contacts the metallic base material and the ceramics base material if necessary. When the metallic base material and the ceramics base material are surface-activated by the plasma, the surface activated surfaces contact and bond to each other by the bonding unit. The bonding unit includes a first mounting member (310), a second mounting member (320), and a driver (330).