METHOD FOR FILLING COATING SOLUTION, SLIT NOZZLE, CLOSING MEMBER FOR DISCHARGE HOLE, AND SLIT NOZZLE UNIT

摘要

The present invention provides a method for filling a coating solution by which gas is released out of a slit nozzle that applies a coating solution on the surface of a substrate and the coating solution is filled. The silt nozzle include: a coating solution supply inlet, a coating solution discharge outlet, a manifold which communicate with the coating solution supply inlet and stores the coating solution inside the slit nozzle; a solution pathway which communicates with the manifold and makes the coating solution flow to the coating solution discharge outlet of the slit nozzle; and a vent hole to release out gas contained in the manifold. The method for filling a coating solution includes a discharge outlet closing process and a vent hole opening process. In the discharge outlet closing process, the discharge outlet is closed while the coating solution is transferred from the coating solution supply inlet to the inside of the slit nozzle. In the vent hole opening process, the vent hole is opened.;COPYRIGHT KIPO 2014