METHOD FOR REMOVING SI FROM Si-CONTAINING HYDROFLUORIC ACID WASTE LIQUID, METHOD FOR RECOVERING HYDROFLUORIC ACID FROM Si-CONTAINING HYDROFLUORIC ACID MIXED ACID WASTE LIQUID AND RECOVERY DEVICE

摘要

A removing method according to the present invention comprises a Si removing process which adds salts to a waste fluid containing hydrofluoric acid and Si and removes precipitates produced by the addition of the salts thereby obtaining Si-removed waste fluid. It is desirable to use one or more kinds of salts selected from the group consisting of metal fluoride salts and chloride metal salts for salts. According to the removing method, it is possible to effectively reduce or remove Si contained in Si-containing hydrofluoric acid waste fluid.;COPYRIGHT KIPO 2014