DUCTILE MODE MACHINING METHODS FOR HARD AND BRITTLE COMPONENTS OF PLASMA PROCESSING APPARATUSES

摘要

PROBLEM TO BE SOLVED: To provide a method of ductile mode machining of a component of a plasma processing apparatus made of a nonmetallic hard and brittle material.;SOLUTION: The method comprises single-point turning the component with a diamond cutting tool, causing a portion of a nonmetallic hard and brittle material to undergo a high pressure phase transformation to form a ductile phase portion of the hard and brittle material during chip formation. A turned surface is formed from a phase changed material, and the turned surface is a grooved textured surface of the phase changed material.;COPYRIGHT: (C)2014,JPO&INPIT