RECYCLING METHOD FOR CARBON RECYCLED PARTS INTO CHAMBER OF MAKING POLY-CRYSTALLINE SILICON

摘要

The present invention relates to a method for recycling a carbon material part which has been used in a polycrystalline silicon generation chamber and which has been cut with polycrystalline silicon attached to the carbon material part. The method for recycling the carbon material part in the polycrystalline silicon manufacturing chamber comprises: a physical removal step of cutting polycrystalline silicon attached to the carbon material part using a cutting means; a chemical removal step of removing only polycrystalline silicon attached to the carbon material part by an etching method using chemicals; and a foreign substance removal step of removing foreign substances including residual moisture to complete the recycling of the carbon material part. The recycling method is characterized by impregnating the carbon material part with moisture, followed by etching the polycrystalline silicon attached to the carbon material part with chemicals; washing the carbon material part after etching the polycrystalline silicon; and primarily removing the foreign substances by forced exhaustion and secondarily removing residual foreign substances in a vacuum oven to recycle the carbon material part into an uncontaminated part.