METHOD FOR CORRECTING TEMPERATURE DISTRIBUTION OF SEMICONDUCTOR DEVICE MEASURED BY INFRARED THERMAL IMAGING CAMERA AND SYSTEM USING THE SAME

摘要

The present invention is provided to obtain an accurate distribution measurement on the surface of a semiconductor device by using an infrared thermal image camera. As a result, the disclosed invention obtains an accurate temperature distribution measurement on the surface of a semiconductor device by using an infrared thermal image camera by correcting factors which decrease accuracy by analyzing the factors which decrease accuracy in the temperature measurement of the semiconductor device.