GLASSY CARBON MOLD FOR MICROPATTERN FORMATION USING RAPID HEATING METHOD, MANUFACTURING METHOD THEREOF AND METHOD FOR FORMING MICROPATTERN USING GLASSY CARBON MOLD

摘要

The present invention provides a method which prevents resistance at a contact point between a pattern part and an electrode from being increased during applying electricity for heating and is able to effectively heat only the pattern part of a mold in a mold heating method of a high temperature compressed pattern forming technology using a resistance heating method. A manufacturing method for a glassy carbon mold for forming a micro-pattern of a rapid heating method according to an embodiment of the present invention comprises: a step of locating a first conductor and a second conductor so that one part is included in the upper surface of a first mold, and the other part is exposed to the outside from both ends of the first mold on both ends of the upper part of the first mold formed in order to have a protrusion part of a micro-nanopattern while being separated on the first mold; a step of spraying thermosetting mixtures on the first mold and allowing sprayed mixtures to contain the part of the first conductor and second conductor; a step of manufacturing a thermosetting resin precursor layer hardened by hardening the sprayed mixture; a step of producing a glassy carbon mold including the part of the first conductor and second conductor at an inner space by performing a carbonization process on the hardened thermosetting resin precursor layer; and a step of separating the produced glassy carbon mold from the first mold.