METHOD OF MANUFACTURING POLYSILICON USING APPARATUS FOR MANUFACTURING POLYSILICON BASED ELECTRON-BEAM MELTING USING DUMMY BAR

摘要

dummy bar to start using blocks that can improve the efficiency of the electron beam refining silicon-based polysilicon manufacturing equipment and discloses a method and. Electron beam-based polysilicon manufacturing apparatus according to the invention is arranged on the upper vacuum chamber, the first and second electron gun for irradiating an electron beam (electron beam) in a vacuum chamber (electron-gun); Disposed in a first electron beam irradiation area by the first electron gun, the silicon raw material is charged into silicon melt portion is melted by the first beam; And is disposed on the second electron beam irradiation area by the second electron gun start block to maintain the molten state of the silicon melt which is supplied from the silicon melt portion, is driven in the lower direction to feed the molten silicon inside the lower direction (start block) which is equipped with, a cooling channel is formed in the lower side to the upper direction from the solidified molten silicon is solidified in one direction and the lower portion being cast; and include, the start block, dummy silicon button is bonded to the top bar characterized in that it comprises a (dummy bar). ;