METHOD FOR MANUFACTURING GAS SUPPLY STRUCTURE IN ELECTROSTATIC CHUCK APPARATUS, GAS SUPPLY STRUCTURE IN ELECTROSTATIC CHUCK APPARATUS, AND ELECTROSTATIC CHUCK APPARATUS

摘要

metal-based (1) on the upper surface side to the electrostatic chuck having a chuck device the method, provides a method of cooling gas injection amount of spraying material, such as non-uniform upset gas supply structure to prevent the contamination by the deposition of the screen. Supplying to the back surface of the metal based on the cooling gas supplied from the lower surface side of (1), metal-based (1) an upper insulating layer through the gas supply path (3) that is provided (6) a substrate (W) on the side adsorbed A method of manufacturing a gas supply structure for metal spraying the ceramic powder on the upper surface side of the base (1) to form a lower insulating layer (4) process, to form a suction electrode (5) step, and the upper insulating layer (6 ) prior to the step of forming a gas supply path to the outlet of the upper surface side of the lower insulating layer 4 is an adhesive containing a filler made of a material such as ceramic powder to be used for the formation of (8) with a metal base (1) (3a) to prevent, after the formation of the upper insulating layer 6, a hole toward the gas supply path outlet (3a) of the metal base (1), the gas supply through-hole 9 to form a gas supply structure communicating with the path (3) The manufacturing method. ;