MICRO-ELECTROMECHANICAL SYSTEM BASED SWITCHING MODULE SERIALLY STACKABLE WITH OTHER SUCH MODULES TO MEET A VOLTAGE RATING

摘要

MEMS-based switching module (e.g., 12, 100), as may be electrically connected to other such modules (14, 16) in a series circuit, to achieve a desired voltage rating is provided. A switching array (10) may be made up of a plurality of such switching modules (e.g., used as building blocks of the switching array) with circuitry (100, 106, 108, 110) configured so that any number of modules can be connected in series to achieve the desired voltage rating (e.g., voltage scalability).