The present invention provides a frequency dependent transmission line parameter determination method using a frequency dependent complex permittivity comprising; a de-embedding step of removing a pad parasitic component of a transmission line; a step of determining a transmission line parameter in measuring data after the de-embedding step; a step of determining a frequency dependent complex permittivity of the transmission line; a step of determining a stable data section before a first resonant frequency using the determined transmission line parameter; a step of determining a transmission line model constant of the stable data section; and a step of determining the frequency dependent transmission line parameter capable of solving a data unstable problem around a resonant frequency using the transmission model constant of the stable data section and the frequency dependent complex permittivity.
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