Manufacturing method of space transformer for glass base probe card and the space transformer for glass base probe card thereby

摘要

The present invention relates to a space transformer for a probe card, the method of manufacturing a space transformer for a probe card a first step of preparing a glass substrate, and a second step of forming a mask layer for a via hole pattern formed on the glass substrate, forming a third via hole according to the set pattern of the mask pattern layer on the glass substrate step and the fourth step of filling the conductive material in the via hole, the via hole and electrically connects, for insulation between the metal wiring electrode on the glass substrate, and a fifth step of forming a metal wiring electrode on the glass substrate surface, comprising a sixth step of forming an insulation film, method for producing a space transformer for a probe card based glass, characterized in that the repeating step to the sixth step in the first glass substrate is formed by laminating a first layer formed of the space transformer and thereby directed to a space transformer for a probe card prepared based glass. Thus the present invention, since it does not use the conventional method of a multilayer ceramic sintered simultaneously improve the productivity by improving the yield strain does not occur due to the contraction and expansion of the space transformer and there is an advantage that the manufacturing cost reduction. ;