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X-ray image detector with charge accumulation layer formed isolation pattern and method of manufacturing this

机译:具有形成电荷积累层的隔离图案的x射线图像检测器及其制造方法

摘要

The present invention relates to an X-ray image detector including a charge accumulation layer having an insulating pattern and a method of manufacturing the same. The X-ray image detector based on an optical switching scheme includes a glass substrate formed therein with a plurality of electrode lines, and an X-ray photoconduction layer (X-ray PCL), a charge accumulation layer, and a read-out PCL which are sequentially stacked from an upper portion of the glass substrate. The charge accumulation layer includes insulating patterns corresponding to the electrode lines on the glass substrate in order to concentrate charge accumulation according to regions and to induce an internal electric field of the read-out PCL according to the regions. As described above, according to the present invention, the X-ray image detector including the charge accumulation layer having the insulating pattern according to the present invention concentrates charge accumulation of the charge accumulation layer according to pixel regions through the insulating pattern or induces the internal electric field of the read-out PCL according to the regions, thereby more enhancing the resolution of the image.
机译:X射线图像检测器及其制造方法技术领域本发明涉及一种包括具有绝缘图案的电荷累积层的X射线图像检测器及其制造方法。基于光开关方案的X射线图像检测器包括在其中形成有多条电极线的玻璃基板,X射线光电导层(X射线PCL),电荷累积层和读出PCL从玻璃基板的上部顺序堆叠它们。电荷累积层包括与玻璃基板上的电极线相对应的绝缘图案,以便根据区域集中电荷累积并根据区域感应读出的PCL的内部电场。如上所述,根据本发明,包括具有根据本发明的绝缘图案的电荷累积层的X射线图像检测器通过绝缘图案使根据像素区域的电荷累积层的电荷累积集中或感应内部电荷。读出的PCL的电场根据区域而定,从而更加提高了图像的分辨率。

著录项

  • 公开/公告号KR101456084B1

    专利类型

  • 公开/公告日2014-10-31

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20120135781

  • 发明设计人 허두창;양기동;전성채;차보경;

    申请日2012-11-28

  • 分类号H01L27/14;G01T1/24;

  • 国家 KR

  • 入库时间 2022-08-21 15:39:52

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