INSTALLATION AND METHOD FOR PRECIPITATION single layer, multilayer and nanostructured wear-resistant coatings

摘要

1. Apparatus for applying monolayer and multilayer nanostructured coatings obtained by means of chemical reactions between gaseous compounds of the elements from the group B, Ti, Al, Ga, Si, W, Mb, Mo, Ta, Cr, Zr, Hf and gaseous compounds of the elements from the group C, N, O, comprising: a. The reaction chamber divided into compartments with independent control of the chemical composition of the gas phase and the temperature in each compartment; b. The delivery system precisely metered amounts of gaseous precursor compounds of B, Ti, Al, Ga, Si, W, Mb, Mo, Ta, Cr, Zr, Hf in the reaction chamber; c. The delivery system precisely metered amounts of gaseous precursor compounds from the group of C, N, O in the reaction chamber; d. The delivery system precisely metered quantities of carrier gas from the group of Ar, He, H2, N2; e. The delivery system precisely metered amounts of etchant gas-HCl group, Cl2, HF; f. System removal of gaseous reaction products; g. Mechanism for moving the cover member between the compartments reciprocating or rotary tipa.2. Installation for coating according to claim 1, wherein the gaseous compounds are synthesized inside the installation of a solid or liquid compounds and elements from chemical reaktsiy.3. Installation for coating according to claims 1 and 2 to the activation of chemical reactions by thermal nagreva.4. Installation for coating according to claims 1 and 2 to the activation of chemical reactions plazmy.5 excitation. A method of coating using the apparatus of claims 1, 2, 3 and 4, comprising cleaning the surface of the coated strip by means of chemical etching in a gas atmosphere directly in the reaction kamere.6. A method of coating used to