A method for producing a disc-shaped workpiece on the basis of a dielectric substrate and a vacuum treatment system therefor.

摘要

A dielectric substrate (100) is coated at a first vacuum coating station (102) with a layer whose material has a specific resistance ρ, for which 10 - 5 Ωcm ≤ ρ ≤ 10 - 1 Ωcm, so that the resulting surface resistance R s is in the following range: 0 R s ≤ 10-4 Ω. Thereafter, the coated dielectric substrate (104) is subjected to a reactive high-frequency plasma treatment step in a station (105).