Optical examination of the surface or a layer of an object or medium, whereby the surface is illuminated with polarized visual radiation and reflected or scattered radiation is measured on an area by area basis

摘要

Method for examining a surface (12) or a layer in which polarized visual radiation (18) is used to illuminate the surface or layer and measurement radiation (36) reflected or scattered originating from locations (38) on the surface is measured to determine surface polarization properties. Independent claims are also included for the following:- (a) a device for examining the polarization properties of a surface and; (b) a sensor for measuring optical radiation with a field of photodetector elements over which a polarization filter, especially in the form of a metal, is applied.