Sample positioning device and scanning probe microscope with the sample positioning device

摘要

Sample positioning device, in particular for a scanning probe microscope, with (a) a sample table (12), (b) a first sample table drive (14) which is mechanically coupled to the sample table (12), for moving the sample table (12) in a first direction ( x), (c) a second sample table drive (16), which is mechanically coupled to the sample table (12), for moving the sample table (12) in a second direction (y), (d) different from the first direction (x) wherein the first sample table drive (14) has a first moving coil arrangement, and (e) wherein the second sample table drive (16) has a second moving coil arrangement, characterized in that (f) the first sample table drive (14) comprises a first loudspeaker (18) which comprises a first loudspeaker dome (62), a first loudspeaker magnet (20) and a first moving coil arrangement, the first loudspeaker magnet (20) being part of the first moving coil arrangement and the second sample table drive (16 ) comprises a second loudspeaker (22) which comprises a second loudspeaker dome (26), a second loudspeaker magnet (24) and a second moving coil arrangement, the second loudspeaker magnet (24) being part of the second moving coil arrangement.