Apparatus and method for measuring and compensation of the movement effects in the case of phase push-profilometers and its application to mobile, beam-emitting head profilometry comprising

摘要

Device for sliding phase profilometry by means of a measuring instrument comprising– a projector (1) for sending a phase shift sequence of four phase sliding pattern, which, in addition, by means of a fixed sequence of values are amplitude-modulated and modulated measurement pattern 1, 2, 3 and 4 on an object (3) generating;– a detecting means (5) for detecting a of the object (3) reflected light;– an electronic data processing means (7) for processing of image data generated by means of the light;the data processing means (7) due to a relative movement of the object to the measuring device measuring errors produced by means of one of the relative movement in a direction opposite the subsequent displacement of images produced by means of the image data is compensated for, characterized in that the data processing means (7), the displacement of the images by analysis of a modulated sequence of values m, which corresponds to a modulation image, evaluated and optimized, wherein the sequence of values m by means of a following equation: from the four by means of the measurement pattern 1, 2, 3 and 4 generated images, where l is calculated._k with k = 1, 2, 3 and 4 for in each case one of the four images, andthe optimization is carried out by means of the following equation: withx '': coordinate in a main direction of a coordinate system of the detection device;∂x '': displacement,with decreasing sum of the derivative amounts of the modulation image the compensation is improved.