Holder, used to hold electrostatic substrate, includes identical layered structure that includes support and electrode and cover layers, where geometric ratio of support surface to thickness of layered structure has specified value

摘要

The electrostatic substrate holder comprises an identical layered structure that comprises a support (21), an electrically conductive electrode layer (23) for electrostatically fixing a substrate and an electrically insulating cover layer (27) partially covering the electrode layer. A geometric ratio of a square root of a surface of the support to a thickness of the layered structure is 20:1, 50:1, 100:1, 200:1, 500:1 or 1000:1. The thickness of the layered structure is less than 3 mm. The electrode layer comprises electrically isolated electrode segments. The electrostatic substrate holder comprises an identical layered structure that comprises a support (21), an electrically conductive electrode layer (23) for electrostatically fixing a substrate and an electrically insulating cover layer (27) partially covering the electrode layer. A geometric ratio of a square root of a surface of the support to a thickness of the layered structure is 20:1, 50:1, 100:1, 200:1, 500:1 or 1000:1. The thickness of the layered structure is less than 3 mm. The electrode layer comprises electrically isolated electrode segments in a substrate support portion for holding the substrate. The layered structure further comprises a plate structure formed on the support facing away from outside against a lateral peripheral portion of the layered structure. The plate structure comprises plate section separated from each other by a gap. A side edge of the plate section in the substrate support portion extends into, passes through and completely lies within the substrate support portion. The plate structure and/or the plate section is arranged between the support and the electrode layer by an intermediate layer (22) that extends through the layered structure. The plate structure is formed of a support plate that extends through the layered structure, and comprises separate segments of the intermediate layer and/or separate support plates. A geometric configuration and/or a position of intermediate layer segments and/or support plates is adjusted to a geometric configuration and/or a position of electrode segments and/or to a geometric configuration and/or position of substrate support portion. The cover layer has an average surface roughness of 10-100 mu m, 20-80 mu m, 40-60 mu m or 50 mu m. The identical layered structure is provided on a front and a back of the support. The support has a thickness of 3 mm. The electrode layer has a thickness of 10-50 mu m. The intermediate layer and/or the support plate has a thickness of 300 mu m. The support has an extension, to which an electrical connection (30) for electrodes is formed, which protrudes from a side edge of the layered structure. The cover layer is formed as an acid-resistant layer. An independent claim is included for a mobile portable electrostatic substrate holder assembly.