Monorail conveyor system installed in clean room, for conveying article e.g. wafer in assembly line, has conveyor that is provided with non-contact drive, and wheel that is provided with point-like support with respect to rail surface

摘要

The system has a guide rail (10) that is movably mounted on a conveyor (21). A wheel is provided on a surface (16) of the guide rail. The conveyor is provided with a non-contact drive with respect to the guide rail. The wheel is provided with a point-like support with respect to the surface of the guide rail. The surface of the guide rail is provided with contact surfaces (17,18). The two wheels stand essentially perpendicular to the respective contact surfaces.