A method for the evaluation of the short-wave, by means of narrow-band scatter images generated coherent laser radiation of objectives, in particular for use in the xuv microscopy

摘要

The object of the invention, which, by means of a narrow-band, short-wave, coherent laser radiation generated microscopic scattering patterns under a high-resolution detection with as little time and economic expenditure as well as under high throughput to evaluate and to be able to clearly determine. In particular, for medical purposes, a fast, meaningful and easy to handle microscopic analysis option, for example for clinical routine- and preventive medical examinations, are to be created.In accordance with the invention, the resulting from the object as well as in a spatially resolved manner scattering microscopy picture detected in each case without necessary reconstruction of the object with reference data are compared and on the basis of this in its radiation characteristic is evaluated classified.