Method for protecting tube target of tube magnetron from corrosion, involves maintaining potential difference between magnet system and tube target so that potential difference is smaller than potential barrier

摘要

The method involves operating the tube target (1) as a cathode. The tube target comprises a rotatable base tube (11) with a target material (12). The tube target is cooled by a cooling circuit with a cooling agent, where the cooling circuit is arranged in the inner space of the tube target. A potential difference is maintained between a magnet system (4) and the tube target so that the potential difference is smaller than the potential barrier for electrochemical corrosion reactions at the surface of the base tube standing in contact with the cooling agent. An independent claim is included for an arrangement for protecting a tube target of a tube magnetron from corrosion.