Arrangement for generating mono-energetic single electron, has tungsten wire support portion whose inner diameter is set larger than the diameter of high current primary beam

摘要

The arrangement has a vacuum chamber that is provided with several beam guide spots through which high current primary beam is directed. A support portion of a tungsten wire is arranged in the vacuum chamber such that high current primary beam is applied on the tungsten wire. The mono-energetic single electron beam generated by the beam guide spots is derived. The inner diameter of the support portion is set larger than the diameter of high current primary beam. The diameter of the tungsten wire is set smaller than the diameter of high current primary beam. An independent claim is included for a method for generating mono-energetic single electron.