首页> 外国专利> Receiving a coating material in vacuum coating plants by a cover on a side of a planar substrate, comprises moving the cover such that it permanently receives a part of the coating material non-absorbed by the substrate

Receiving a coating material in vacuum coating plants by a cover on a side of a planar substrate, comprises moving the cover such that it permanently receives a part of the coating material non-absorbed by the substrate

机译:通过在平面基板的一侧上的盖来在真空镀膜设备中接收涂料,包括移动盖,使得盖永久性地接收未被基板吸收的一部分涂料。

摘要

Receiving a coating material in vacuum coating plants by a cover on a side of a planar substrate (1), facing away from the coating device, comprises moving the cover such that it permanently receives a part of the coating material non-absorbed by the substrate. An independent claim is also included for an apparatus used in a coating chamber for shielding a part of the substrate and/or a wall of the coating chamber against undesirable coating, comprising a cover on the side of the substrate, facing away from the coating apparatus. The cover is movable, and the device is designed such that the coated portion of the cover is automatically moved before the material thickness of the deposited material increases such that the material is peeled off.
机译:通过在平面基板(1)背对涂层设备的一侧上的盖来在真空镀膜厂中接收涂料,包括移动盖,使其永久性地接收未被基板吸收的一部分涂料。还包括一种独立权利要求,其用于在涂覆室中用于屏蔽衬底的一部分和/或涂覆室的壁以防止不期望的涂覆的设备,该设备包括在衬底的背向涂覆设备的一侧上的盖。 。盖是可移动的,并且该装置被设计为使得盖的涂覆部分在沉积材料的材料厚度增加之前自动移动,从而剥离材料。

著录项

  • 公开/公告号DE102012209051A1

    专利类型

  • 公开/公告日2013-12-05

    原文格式PDF

  • 申请/专利权人 ROTH & RAU AG;

    申请/专利号DE201210209051

  • 发明设计人 KEHR MIRKO;WEINKE MARTIN;

    申请日2012-05-30

  • 分类号C23C14/56;

  • 国家 DE

  • 入库时间 2022-08-21 15:37:45

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