Measuring device used for measuring and monitoring laser beam, has high-precision monitoring unit to perform precise control of variable to be monitored and quick information monitoring unit to perform rapid monitoring of variable

摘要

The measuring device (2a) has directional control unit provided for measuring and monitoring the direction of the laser beam (1f,1h). A location monitor (43a) measures and monitors laser beam in place of a control plane (69a). A power monitoring device (29a) measures and monitors laser beam energy. A high-precision monitoring unit (9a) performs precise control of a variable to be monitored. A quick information monitoring unit (19a,29b) performs rapid monitoring of the monitored variable. An independent claim is included for beam guidance system for guide of laser beam to measurement device.