For a combined processing means determination method ultra precision machining apparatus and combined ultrapräzisionsbearbeitunsvorrichtung

摘要

Is provided a method for determining a working means, in a hybrid ultra precision machining apparatus for producing a micromachined product from a workpiece, wherein the processing device comprises: an electromagnetic wave -use for processing means includes of the workpiece; a precision machining means for precision machining of the rough workpiece; and a shape measuring means for measuring a shape of the workpiece in the case of use of the electromagnetic waves of the working means and using precision machining medium, wherein a choice between the electromagnetic waves and the processing means using precision machining means in the determination of the working means is provided on the basis of: information on a stereoscopic model of the micromachined product; information on a ablating volume, the of a volume of the workpiece in the production of the micromachined product is removed; and data via a removal process time of the electromagnetic waves using the working means and data via a removal process time of the precision machining medium.