A chemical species sensor and a method for detecting a chemical species

摘要

The present invention relates to a chemical species sensor for detection of one or more chemical species as a gas, liquid or vapor phase, wherein the sensor is a layer of a semiconducting material, which forms a conductive channel, a layer of a gate material, which is on the semi-conductive layer and as the gas collecting zone-layer serves, at least two spatially separated electrodes at the respective ends of the channel, which serve as a source and drain electrodes, a supply of alternating voltage or can be connected with the electrodes, a circuit for varying the frequency of the ac voltage, and an analyzer for the determination of the frequency response of the sensor, whether a chemical species is located on the gate - material, contains. Furthermore, the process claimed for the detection of chemical species with the use of such a sensor.