Arrangement of magnetron e.g. planar magnetron, has clamping structure that is provided to clamp target against carrier to provide direct flow of power between clamping structure and target receiving area

摘要

The arrangement (100) has a target (4) that is provided on the carrier (3) comprising a target receiving area for receiving the target and a recess below the target. A clamping structure (5) is provided to clamp the target against the carrier to provide a direct flow of power between the clamping structure and the target receiving area.