Use of a composition comprising diethylzinc and a tricyclic aryl compound, in chemical vapor deposition process for depositing zinc oxide film, such as conductive transparent oxide film, which is useful to manufacture flat panel display

摘要

Use of a composition comprising a diethylzinc and a tricyclic aryl compound (X), in a process for depositing a zinc oxide film, is claimed. Use of a composition comprising a diethylzinc and a tricyclic aryl compound of formula (X), in a process for depositing a zinc oxide film, is claimed. R1 : H, alkyl, an olefin conjugated with aromatic ring, or optionally substituted 1-12C aryl. An independent claim is included for depositing the zinc oxide film, comprising (a) positioning a substrate in a deposition chamber, (b) vaporizing the composition, and (c) introducing, into the deposition chamber, a gaseous mixture comprising an oxygen source, such as water or an alcohol optionally containing less than 5C, and a doping product consisting of trimethylaluminum, triethylaluminum, tri-propylaluminum, diethyl ethoxide, dimethyl isopropoxide, tris(acetylacetonate) aluminum, tris(acetate) aluminum, tris(tetramethylheptadionate) aluminum, aluminum alkoxide, aluminum chloride, tris(dimethylamino) aluminum, trimethylgallium, triethylgallium, tri-propylgallium, diethylgallium ethoxide, dimethyl gallium, isopropoxide, tris(acetylacetonate)gallium, tris(acetate)gallium, tris(tetramethylheptadionate)gallium, gallium alkoxide, gallium chloride, tris(dimethylamino)gallium, diborane, trimethylborane, triethylborane, trimethylborate, tri-isopropylborate and 1,3,5-trimethylborazine. [Image].