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SPECTRAL TRANSMITTANCE MEASUREMENT DEVICE

机译:光谱透射测量装置

摘要

PROBLEM TO BE SOLVED: To enable a decline in the luminous energy of a measurement beam used in spectrometry to be suppressed when spectrometry of a lens to be inspected that causes an axial chromatic aberration is performed in a spectral transmittance measurement device, making it possible to increase measurement accuracy.;SOLUTION: A spectral transmittance measurement device 100 is configured to comprise: a light source 1; a first optical system 2 forming a measurement beam L2; a lens support frame 5 for arranging a lens 3 to be inspected on the optical path of the measurement beam L2; a second optical system 4, including a chromatic aberration correction lens 4A to correct an axial chromatic aberration caused by the lens 3 to be inspected, for condensing a measurement beam L3 having passed through the lens 3 to be inspected; a diaphragm 8a arranged at the condensing position of a measurement beam L5; a spectrometer 8 for separating the measurement beam L5 having passed through the diaphragm 8a into spectral components and obtaining spectroscopic intensity data; and a movement stage 6 for moving the lens 3 to be inspected and the chromatic aberration correction lens 4A in a direction along a measurement beam axis O in order to adjust the condensing position of the measurement beam L5.;COPYRIGHT: (C)2015,JPO&INPIT
机译:解决的问题:当在光谱透射率测量装置中执行导致轴向色差的待检查透镜的光谱测定时,为了抑制光谱测定中使用的测量光束的光能下降,可以解决方案:光谱透射率测量装置100被配置为包括:光源1;以及第一光学系统2形成测量光束L2;透镜支撑框架5,用于将待检查的透镜3布置在测量光束L2的光路上。第二光学系统4,包括色差校正透镜4A,以校正由被检查透镜3引起的轴向色差,以会聚已经通过被检查透镜3的测量光束L3。在测定光束L5的会聚位置配置有光圈8a。分光计8,用于将通过光圈8a的测定光束L5分离为光谱成分,得到光谱强度数据。载物台6,其用于使被检查透镜3和色差校正透镜4A沿着测量光束轴O的方向移动,以调整测量光束L5的会聚位置。(版权):( C)2015,日本特许厅

著录项

  • 公开/公告号JP2015129674A

    专利类型

  • 公开/公告日2015-07-16

    原文格式PDF

  • 申请/专利权人 OLYMPUS CORP;

    申请/专利号JP20140001111

  • 发明设计人 KOIKE TAKEHIKO;MARUYAMA MASAKI;

    申请日2014-01-07

  • 分类号G01M11/00;

  • 国家 JP

  • 入库时间 2022-08-21 15:35:11

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