ASSESSMENT DATA PREPARATION DEVICE, ASSESSMENT DATA PREPARATION PROGRAM, ASSESSMENT DATA PREPARATION SYSTEM AND ASSESSMENT DATA PREPARATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an assessment data preparation device, an assessment data preparation program, and an assessment data preparation system and an assessment data preparation method that prepare assessment data for assessing characteristics of surface treatment films.;SOLUTION: An assessment data preparation device 20 according to an embodiment has: a Fourier transformation unit 21B that performs a Fourier transformation of first image data corresponding to a first reflection image of a predetermined image appearing on a surface of a first optical film 31 adhered in a substrate 11 to calculate a first spectrum distribution; a relative spectrum calculation unit 21C that computes a ratio of a second spectrum distribution for reference purposes to the first spectrum distribution and thereby prepares a relative spectrum distribution with respect to th second spectrum distribution; and an assessment data preparation unit 21D that calculates an average value of a plurality of spectrums with respect to the same spatial frequency included in the relative spectrum distribution and prepares assessment data.;COPYRIGHT: (C)2015,JPO&INPIT