METHOD OF ENHANCING IMAGE QUALITY OF SCAN CHARGED-PARTICLE MICROSCOPE IMAGE AND SCAN CHARGED-PARTICLE MICROSCOPE APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable high-speed display of a resultant obtained by executing proper image-quality enhancing processing on an image being scanned which is picked up by a charged-particle microscope.SOLUTION: A scan charged-particle microscope apparatus is provided with image-quality enhancing means for executing image-quality enhancing processing on image data obtained by irradiating a sample with converged charged particles while scanning the sample and detecting occurring particles from the sample. With respect to image data within an imaging visual field of charged particle optical system means, the image-quality enhancing means divides an image-data obtained region into two or more areas on the basis of the distance from a non-obtained region of the image data within the imaging visual field. An image-quality enhancing method and a processing parameter for the enhancement of the image quality are determined for the image data of each of the divided areas according to the divided areas, and the image-quality enhancing processing is executed by using the processing method and the processing parameter corresponding to the divided area determined for the image data of each divided area.