PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC DEVICE USING THE PIEZOELECTRIC VIBRATION ELEMENT, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATION ELEMENT, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE USING THE PIEZOELECTRIC VIBRATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element having high reliability which suppresses reduction in an electrode dimension during frequency adjustment and has excellent weather resistance and heat resistance, and also to provide a piezoelectric device using the piezoelectric vibration element, a method of manufacturing the piezoelectric vibration element, and a method of manufacturing the piezoelectric device using the piezoelectric vibration element.SOLUTION: In a crystal vibration element 2, excitation electrodes 23a, 23b are formed on the surface and rear surface of a crystal vibration plate. The excitation electrode contains copper as a main component and comprises a ternary-system alloy containing a first additive whose first sputtering rate is lower than copper as the additive and which is a metal element unlikely to be corroded with respect to etchant, and a second additive which is an element to form a solid solution with copper. The outer peripheral part of the excitation electrode is a region (9) whose first additive is rich.