SYSTEM AND METHOD FOR PARTIAL DISSOLUTION FILM PROCESSING BASED ON ASYNCHRONOUS PULSE

摘要

PROBLEM TO BE SOLVED: To provide a thin film processing technique.SOLUTION: A thin film processing method irradiates a first area of thin film with a first laser pulse and a second laser pulse while formation of the thin film is advanced in a first selection direction. Each laser pulse supplies a shaped beam, and has a sufficient fluence to partially dissolve the thin film. The first area re-coagulates and crystallizes to form a first crystallized area. The method further irradiates a second area of the thin film with a third laser pulse and a fourth laser pulse. Each laser pulse supplies a shaped beam, and has a sufficiently fluence to partially dissolve the thin film, and the second area is re-coagulates and crystallizes to form a second crystallized area. The time interval between the first laser pulse and the second laser pulse is less than the half of the time interval between the first and third laser pulses.