VACUUM EVAPORATION DEVICE, AND CRUCIBLE CARRY-IN/OUT MECHANISM AND CRUCIBLE CARRY-IN/OUT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a vacuum evaporation device, and a crucible carry-in/out mechanism and crucible carry-in/out method that easily improve operation efficiency of an operation in carrying a crucible in and out of an evaporation source.;SOLUTION: The present invention relates to a vacuum evaporation device that has an evaporation source including: a crucible which stores an evaporation material; heating means provided at a periphery of the crucible and heating the crucible; heat insulation means of preventing heat from leaking to the outside; a plurality of nozzles provided along a length of the crucible; and a housing which has an opening part on the side of the plurality of nozzles, and houses the crucible, heating means, and heat insulation means. The evaporation source has a retaining part for suppressing the crucible from shifting, and a retained part where the crucible is retained and a guide part which locates the crucible at a predetermined position in the housing when the crucible is carried in the evaporation source.;COPYRIGHT: (C)2016,JPO&INPIT