REFLECTANCE MEASUREMENT MICROSCOPE ENABLING RECOGNITION OF PERPENDICULARITY BETWEEN INCLINED PLANE OR SPHERICAL SAMPLE SURFACE AND OPTICAL AXIS BY USING INFINITE/FINITE CHANGE-OVER MECHANISM IN REFLECTANCE MEASUREMENT MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a reflectance measurement microscope that enables perpendicularity between a sample surface and an optical axis to be correctly and easily recognized upon measuring vertical reflectance of a sample in an optical system using a pin-hole light source in an infinite system microscope.;SOLUTION: An infinite system microscope includes a mechanism that enables an imaging lens to be accurately in a retraction/insertion state manually or automatically.;COPYRIGHT: (C)2015,JPO&INPIT