LUMINANCE DISTRIBUTION MEASUREMENT DEVICE, DRAWING DEVICE, AND LUMINANCE DISTRIBUTION MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To highly accurately determine a luminance distribution.;SOLUTION: A drawing device 1 projects light onto a substrate 9, or an object, to draw a pattern. The drawing device 1 comprises: a drawing head 4 for projecting beam light onto the substrate 9; a holding unit movement mechanism 2 for moving the beam light projected position on the substrate 9; a control unit 6 for drawing a pattern on the substrate 9 by controlling the drawing head 4 and the holding unit movement mechanism 2; and a measurement device 7 for measuring a beam light luminance distribution before a pattern is drawn on the substrate 9. The measurement device 7 comprises: an image storage unit for storing measurement images including beam light projected positions; and an operation unit for obtaining a beam light luminance distribution modeled as a circular or elliptical two-dimensional Gaussian function by determining a plurality of coefficients contained in the two-dimensional Gaussian function, with a Gauss-Newton method or a Levenberg-Marquardt method using pixel values of measurement images. This enables the beam light luminance distribution to be determined with a high accuracy.;COPYRIGHT: (C)2016,JPO&INPIT