WIRE ELECTRIC DISCHARGE MACHINING DEVICE, WIRE ELECTRIC DISCHARGE MACHINING SYSTEM, POWER-SUPPLY UNIT, WIRE ELECTRIC DISCHARGE MACHINING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a structure which can perform a wire electric discharge machining treatment of plural work-pieces at a low cost and in a batch process.;SOLUTION: A wire electric discharge machining device includes plural main rollers 8, 9 which are so juxtaposed to one another in such a manner that a wire 103 is circulated around the rollers, plural work-piece feeding parts 3a, 3b for feeding work-pieces to the wire, a processing power supply unit for supplying a processing voltage to the work-pieces 105a, 105b, and electric supply units 104a, 104b for supplying a processing voltage to a wire part. Plural wire feeding parts are respectively disposed at a first portion, in which the work-pieces are fed to the wire circulating around the plural juxtaposed main rollers, and at a second portion in which the work-pieces are fed to a wire part of which a wire surface circulating around the juxtaposed rollers is different from that of the afore-said wire part. An electric power supply unit is disposed at a third portion in which the wire between the first portion and the second portion is circulated around the plural juxtaposed main rollers, and a processing voltage supplied from one processing power supply unit is supplied to the work-piece onto which electrical discharge processing is carried out at each of the plural work-piece feeding parts.;COPYRIGHT: (C)2015,JPO&INPIT