BOARD INSPECTION METHOD, BOARD INSPECTION APPARATUS, INSPECTION TOOL, AND INSPECTION TOOL SET

摘要

PROBLEM TO BE SOLVED: To provide a board inspection method, a board inspection apparatus, an inspection tool, and an inspection tool set for easily detecting defects in through holes even if a plurality of through holes for connecting plane patterns are provided.SOLUTION: A board inspection method includes: a first current supply process for allowing an inspection current Is to flow between a first position P1 for making continuity with a through hole TH near the through hole TH on a plane pattern 103 of a first surface 101 and a second position P2 for making continuity with the through hole TH near a through hole on a plane pattern 104 of a second surface 102; a first voltage detection process for detecting, as a first voltage V1, a voltage between a third position P3 for making continuity with the thorough hole TH near the through hole TH on the plane pattern 103 during execution of a first current supply process and a fourth position for making continuity with the through hole TH near the through hole TH on the plane pattern 104; and a determination process for determining whether the through hole TH is appropriate on the basis of the first voltage V1.