ENVIRONMENT LOAD MOLECULE SOURCE EVALUATION METHOD, ENVIRONMENT LOAD MOLECULE SOURCE EVALUATION SYSTEM, AND COMPUTER PROGRAM

摘要

PROBLEM TO BE SOLVED: To correctly identify an environment load molecule source at an environment load molecule occurring at an environment load molecule detection part and affecting an environment load molecule as quickly as possible.;SOLUTION: An environment load molecule generation source evaluation method is configured to: solve a simulation calculation model expression of a numeral fluid dynamics by letting concentration and environment condition of each molecule included in gas occurring in each environment load molecule generation source measured by a vacuum ultraviolet-single photon ionization-mass analysis method as a boundary condition to thereby derive a distribution of the concentration of each molecule in an analysis area on the basis of various boundary conditions; store the concentration of each molecule at each position obtained as a result of the derivation, and the concentration of each molecule and environment condition at each environment load molecule generation source when the result thereof is obtained as a simulation resu measure the concentration of each molecule at an environment load molecule detection part by the vacuum ultraviolet-single photon ionization-mass analysis method; and extract the concentration of each molecule measured at the environment load molecule detection part and the concentration of each molecule at each environment load molecule generation source corresponding to the environment condition from the simulation result.;COPYRIGHT: (C)2016,JPO&INPIT