ELECTROSTATIC CHUCK, PLACEMENT PLATE SUPPORT AND MANUFACTURING METHOD OF ELECTROSTATIC CHUCK

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck having long useful life, a placement plate support and a manufacturing method of electrostatic chuck.;SOLUTION: An electrostatic chuck 1 has a ceramic plate 3 as a placement plate, a first layer 5, and a second layer 4. A work 2 is placed on the placement plate. The first layer 5 includes a heater 7. The heater 7 supplies heat to the work 2 via the placement plate. The second layer 4 is formed between the placement plate and the first layer 5. The second layer 4 transfers the heat from the heater 7 to the placement plate. The second layer 4 includes a crimp part 10. The crimp part 10 is formed in the outer peripheral area. The boundary surface at the placement plate side in the crimp part 10 is cramped to the placement plate. The boundary surface at the first layer 5 side in the crimp part 10 is cramped to the first layer 5.;COPYRIGHT: (C)2015,JPO&INPIT