method for manufacturing a sensor chip for X-ray of the direct conversion, direct conversion of X-rays Dental radiology apparatus with sensors, and such sensors for

摘要

This invention relates to a method of manufacturing a chip for detecting the direct conversion of X-rays. The invention also such chips the X-ray direct conversion detector for using, and also relates to a dental radiation device using at least one such detector. Method of manufacturing a wafer, comprising applying a pressure to the powder of polycrystalline semiconductor material and (3,4,4a) step, and a (5-9) step of heating during the setting period. The method includes the preliminary step of providing at least 0.2% of the impurity level in the polycrystalline semiconductor material.