LASER IRRADIATION SYSTEM AND FRAGILE SITE DETECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve the efficiency of laser irradiation.;SOLUTION: A laser irradiation system 10 includes: a laser irradiation device 11 capable of irradiating an irradiation target with a laser beam of a plurality of modes including at least a first mode and a second mode; and a measuring device 12 which detects a state of the irradiation target irradiated with the laser beam of the first mode emitted from the laser irradiation device 11. The laser irradiation system 10 further includes : a fragile site detection unit 41 which detects a fragile site of the irradiation target on the basis of the state of the irradiation object detected by the measuring device 12; and an irradiation control unit 42 which controls irradiation of the laser beam of the plurality of modes emitted from the laser irradiation device 11 and irradiates the fragile site detected by the fragile site detection unit 41 with the laser beam of the second mode.;COPYRIGHT: (C)2015,JPO&INPIT