Temperature distribution estimation device, temperature distribution estimation method and simulation apparatus,

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of estimating temperature distribution caused by heat generation of an object due to ion collision.;SOLUTION: The device for estimating temperature distribution is provided, which estimates temperature distribution in a predetermined region based on heat generation of an object in ion gas, wherein electric potential, ion velocity, and ion density in the predetermined region are obtained, and based on these obtained values, the number of colliding ions which exist in the predetermined region and collide against the object per unit of time, collision energy which is given to the object when one ion collides against the object, and collision frequency which shows how often the ions existing in the predetermined region collide against the object per unit of time are calculated. Based on the calculated number of colliding ions, collision energy, and collision frequency, distribution of the amount of heat generation of the object due to the ion collision is calculated, the temperature distribution in the predetermined region is calculated based on the distribution of amount of heat generation, and the calculated temperature distribution is outputted to the outside.;COPYRIGHT: (C)2013,JPO&INPIT