Manufacturing method of a metal fine structure using the pattern collapse suppression for processing liquid and this of metal microstructures

摘要

Carbon count imidazoriumuharaido and the carbon count pirijiniumuharaido and the carbon count the ammonium halide and the carbon count the solid in chemical compound where have the alkyl group of 12 where have the alkyl group of 14 where have the alkyl group of 14 where has the alkyl group of 12, 14 or 16 or 16, 16 or 18, 14 or 16, carbon count it is the treatment liquid for pattern collapse suppression of metal microstructure body which at least includes the kind which is chosen from midst of the amine oxide compound where has the alkyl group of 14, 16 or 18, and production manner of the metal microstructure body which uses this.