Scattered light detecting device and the scattered light detection method

摘要

PROBLEM TO BE SOLVED: To precisely detect scattered light generated from an object to be measured by irradiating the object to be measured with a plurality of kinds of measurement light having different wavelengths from each other after being switched.;SOLUTION: A scattered light detector includes: a support part which supports an object to be measured; a plurality of light sources arranged in mutually different positions which can irradiate the object to be measured supported by a support part with a plurality of measurement light, respectively; a detector which detects scattered light respectively generated from the object to be measured irradiated with the plurality of measurement light; and a movement mechanism capable of moving the detector in a measurement region which is a region not including a light path to the object to be measured of the measurement light and capable of detecting the scattered light.;COPYRIGHT: (C)2013,JPO&INPIT