Method for producing and thermoacoustic device array of thermoacoustic devices

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thermoacoustic device and a method for manufacturing a thermoacoustic device array, and particularly a method for manufacturing a thermoacoustic device and a method for manufacturing a thermoacoustic device array which use a carbon nanotube.;SOLUTION: A method for manufacturing a thermoacoustic device includes: a first step of providing a substrate; a second step of forming a plurality of parallel recesses on a surface of the substrate at interval by patterning the surface of the substrate; a third step of forming an insulating layer on the patterned surface of the substrate; a fourth step of forming at least one first electrode and at least one second electrode on a surface of the insulating layer between adjacent recesses at intervals; and a fifth step of installing a carbon nanotube structure on the surface of the insulating layer and electrically connecting the carbon nanotube structure to the at least one first electrode and the at least one second electrode.;COPYRIGHT: (C)2014,JPO&INPIT