system and method for detecting out-of-plane linear acceleration using a closed loop linear drive accelerometer

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for sensing out-of-plane linear acceleration to substantially prevent and/or control the movement of a rotor with respect to a stator so that nonlinear changes in force between the rotor and the stator are minimized.;SOLUTION: An out-of-plane linear accelerometer 100 is accelerated in an out-of-plane direction wherein the acceleration generates rotational torque in an unbalanced proof mass 102. A rebalancing force is applied to at least one of a plurality of rotor comb tines 116, 120 and stator comb tines 124, 126 which are alternately arranged, wherein the rebalancing force resists against the rotational torque, the rotor comb tines are disposed at an end of the unbalanced proof mass 102, and the stator comb tines are disposed on a stator 104, 106 adjacent to the end of the unbalanced proof mass. An amount of the acceleration is then determined based on the applied rebalancing force.;COPYRIGHT: (C)2010,JPO&INPIT