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Optical apparatus for observing the millimeter or sub-millimeter structural details of the object with specular behavior

机译:用于观察具有镜面行为的物体的毫米或亚毫米结构细节的光学设备

摘要

A device for observation, by reflection or transmission, of the structural details of an object (2) that exhibits a behaviour that is at least partially specular, located in an exposure area, which includes: - at least one radiation source with an emission surface (6), - an optical projection system that is located in line with the radiation source in relation to the exposure zone, in the path of the radiation, - an optical exposure system (18) designed to optically link the entry aperture (14) of the optical projection system and the emission surface (6), - a projection surface (10) that is linked optically with the object in the exposure zone, and whose received radiation depends on the deflection on the object (2).
机译:一种通过反射或透射来观察物体(2)的结构细节的装置,该装置在曝光区域内具有至少部分镜面反射的行为,该装置包括:-至少一个具有发射面(6)的辐射源,-在辐射路径上相对于曝光区域与辐射源成一条直线的光学投影系统,-光学曝光系统(18),其设计成将光学投影系统的入射孔(14)与发射表面(6)光学连接,-在曝光区域中与物体光学连接的投影表面(10),其接收的辐射取决于在物体(2)上的偏转。

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